Institute of Physics Conference Microscopy of Semiconducting Materials: 1999 Proceedings of the Institute of Physics Conference held 22-25 March 1999, U, Book 164, (Hardcover)

Microscopy of Semiconducting Materials provides an overview of advances in semiconductor studies using microscopy. This authoritative reference explores the use of transmission and scanning electron microscopy, ultrafine electron probes, and EELS to investigate semiconducting structures. It also covers specimen preparation using focused ion beam milling and advances in microscopy techniques using different types of scanning probes, such as AFM, STM, and SCM. In addition, the volume discusses a range of materials, from finished devices to partly processed materials and structures, including nanoscale wires and dots.