Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures, (Paperback)
Joachim Frühauf

Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures, (Paperback)

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  • Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures, (Paperback)
  • Author: Springer
  • ISBN: 9783642060489
  • Format: Paperback
  • Publication Date: 2010-10-13
  • Page Count: 222
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