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Larry F Thompson; C Grant Willson; Seiichi Tagawa

ACS Symposium: Polymers for Microelectronics : Resists and Dielectrics (Series #537) (Hardcover)

Name: ACS Symposium: Polymers for Microelectronics : Resists and Dielectrics (Series #537) (Hardcover)
Brand: Larry F Thompson; C Grant Willson; Seiichi Tagawa
SKU: 39965940
Price: 35.5 USD
Availability: OutOfStock

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Key item features

ACS Symposium: Polymers for Microelectronics: Resists and Dielectrics (Hardcover)

Specs

Book format
Hardcover
Fiction/nonfiction
Non-Fiction
Publication date
May, 1994
Pages
554
Series title
ACS Symposium
Number in series
537

Current price is $35.50

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Product details

Presents recent advances in chemically amplified resists for deep UV, electron beam, and X-ray advanced lithographic technologies. Discusses top surface imaging and dry development resists. Examines the fundamental chemistry of radiation-sensitive materials, including dielectric polymers for integrated circuits and interconnect systems. Valuable reading for polymer chemists, radiation chemists, and materials scientists.

ACS Symposium: Polymers for Microelectronics: Resists and Dielectrics (Hardcover)

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Specifications

Book format

Hardcover

Fiction/nonfiction

Non-Fiction

Genre

Science/Chemistry - Physical & Theoretical, Technology & Engineering/Textiles & Polymers, Technology & Engineering/Electronics - Microelectronics, Language Arts & Disciplines/Linguistics - General

Publication date

May, 1994

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