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NATO Science Series E: Plasma Processing of Semiconductors, Book 336, (Paperback)

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NATO Science Series E: Plasma Processing of Semiconductors, Book 336, (Paperback)
Author: Springer
ISBN: 9789401064866
Format: Paperback
Publication Date: 2012-10-12
Page Count: 613

Specs

Book format
Paperback
Fiction/nonfiction
Non-Fiction
Genre
Computing & Internet
Pub date
1997
Pages
613
Subgenre
Electronics

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Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

NATO Science Series E: Plasma Processing of Semiconductors, Book 336, (Paperback)
Author: Springer
ISBN: 9789401064866
Format: Paperback
Publication Date: 2012-10-12
Page Count: 613

info:

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Specifications

Book format

Paperback

Fiction/nonfiction

Non-Fiction

Genre

Computing & Internet

Pub date

1997

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NATO Science Series E: Plasma Processing of Semiconductors, Book 336, (Paperback)

Key item features

Specs

How do you want your item?

Get free delivery, shipping and more*

About this item

Product details

Specifications

Book format

Fiction/nonfiction

Genre

Pub date

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