Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions, (Hardcover)
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- Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions, (Hardcover)
- Author: William Andrew
- ISBN: 9780815512202
- Format: Hardcover
- Publication Date: 1990-12-31
- Page Count: 546
Specs
- Book formatHardcover
- Fiction/nonfictionNon-Fiction
- GenreComputing & Internet
- Publication dateDecember, 1990
- Pages546
- SubgenreChemical & Biochemical
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This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
- Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions, (Hardcover)
- Author: William Andrew
- ISBN: 9780815512202
- Format: Hardcover
- Publication Date: 1990-12-31
- Page Count: 546
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Specifications
Book format
Hardcover
Fiction/nonfiction
Non-Fiction
Genre
Computing & Internet
Publication date
December, 1990
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