Hero image 0 of Microtechnology and Mems Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration, (Hardcover), 0 of 1
Microtechnology and Mems Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration, (Hardcover)
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