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Semiconductor Science and Technology Plasma Etching: Fundamentals and Applications, Book 7, (Hardcover)

Semiconductor Science and Technology Plasma Etching: Fundamentals and Applications, Book 7, (Hardcover)

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Minoru Sugawara

Semiconductor Science and Technology Plasma Etching: Fundamentals and Applications, Book 7, (Hardcover)

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Semiconductor Science and Technology Plasma Etching: Fundamentals and Applications, Book 7, (Hardcover)
Author: OUP Oxford
ISBN: 9780198562870
Format: Hardcover
Publication Date: 1998-07-30
Page Count: 356

Specs

Book format
Hardcover
Fiction/nonfiction
Non-Fiction
Genre
Computing & Internet
Pub date
1998-05-28
Pages
356
Subgenre
Electrical

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This book focuses on the remarkable recent advances in understanding low pressure radio frequency glow discharges. It explains the basic analytical theory, plasma physics, and plasma diagnostics, before proceeding to the details of the etching process.

Semiconductor Science and Technology Plasma Etching: Fundamentals and Applications, Book 7, (Hardcover)
Author: OUP Oxford
ISBN: 9780198562870
Format: Hardcover
Publication Date: 1998-07-30
Page Count: 356

info:

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Specifications

Book format

Hardcover

Fiction/nonfiction

Non-Fiction

Genre

Computing & Internet

Pub date

1998-05-28

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