MEMS Capacitive Accelerometer, (Paperback)

This project presents the design, simulation, and fabrication of a novel MEMS capacitive thin film pressure sensor for accurate and efficient pressure measurements. The proposed sensor utilizes a flexible diaphragm structure, fabricated using advanced thin film deposition techniques, to ensure high sensitivity and wide dynamic range. The capacitive sensing principle, coupled with advanced signal processing techniques, enables precise detection of pressure variations. The sensor's design incorporates a unique diaphragm geometry and electrode arrangement to optimize sensitivity and minimize cross-sensitivity to other environmental factors. Finite element analysis (FEA) simulations were conducted to validate the design and predict sensor performance under various operating conditions.